Korean J. Met. Mater. 2024;62(9):726-734. Published online 2024 Sep 5
DOI:
https://doi.org/10.3365/KJMM.2024.62.9.726
Abstract
The effects of annealing temperature and thermal cycle conditions on the adhesion characteristics of non-cyanide Si/sputter TiW/sputter Au/Au bump structure were systematically investigated using a shear test. No intermetallic compound was observed at the TiW/Au interface at all annealing temperatures, and voids formed between the TiW and Au bump interface.....
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