Korean J. Met. Mater. 2023;61(12):909-914. Published online 2023 Nov 30
DOI:
https://doi.org/10.3365/KJMM.2023.61.12.909
Abstract
In this study, a composition-gradient thin film was applied for the formation of intermediate layer of Ti seed layer for an stable electrode stack Ag metal layer. Various composition of Ag-Ti hetero metal layer were simultaneously deposited by using the sputtering process with Ti and Ag target, respectively. An intermediate.....
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