Optimization of the CMP Process with Colloidal Silica Performance for Bulk AlN Single Crystal Substrate
Hyo Sang Kang, Joo Hyung Lee, Jae Hwa Park, Hee Ae Lee, Won Il Park, Seung Min Kang, Sung Chul Yi
Korean J. Met. Mater.. 2019;57(9):582-588.   Published online 2019 Aug 21     DOI: https://doi.org/10.3365/KJMM.2019.57.9.582
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