내 플라즈마 특성 강화를 위한 Y₂O₃ 필름의 이온 빔 보조 증착 공정 최적화

Optimization of Ion Beam-Assisted Deposition Process for Y₂O₃ Film to Enhance Plasma Resistance

Article information

Korean J. Met. Mater.. 2024;62(8):672-672

Publication date (electronic) : 2024 August 5

doi : https://doi.org/10.3365/KJMM.2024.62.8.672

Choluk Oh†, Ojun Kwon†, Younghun Bae, Hyejin Shin*, Young Min Kwon*, Byungjin Cho

오철욱†, 권오준†, 배영헌, 신혜진, 권영민*, 조병진*

See the letter "Optimization of Ion Beam-Assisted Deposition Process for Y₂O₃ Film to Enhance Plasma Resistance" on page 340.

논문철회 공지(Retraction Note)

대한금속·재료학회지 (Korean J. Met. Mater.)

Vol. 62, No. 5 (2024) pp.340-350

DOI: 10.3365/KJMM.2024.62.5.340

상기 논문에 사용된 일부 모식도가 별도 인용 또는 승인 없이 타 저자의 기 출판된 논문 (Influence of Plasma Corrosion Resistance of Y₂O₃ Coated Parts by Cleaning Process, J. Korean Inst. Surf. Eng. 54, 365 (2021)) 그림을 사용한 것이 확인되어 해당 논문을 철회하게 되었습니다.

This article has been retracted by the editor because of unauthorized use of schematic figure in the article originally presented in other paper (Influence of Plasma Corrosion Resistance of Y₂O₃ Coated Parts by Cleaning Process, J. Korean Inst. Surf. Eng. 54, 365 (2021)), without permission from either the original authors or the publisher.

Article information Continued

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