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Microstructure, Thermal and Mechanical Properties of AlN-MgO Composites Prepared by Spark Plasma Sintering
방전 플라즈마 소결법으로 제조된, AlN-MgO 소결체의 미세구조와 열적, 기계적 특성
Mohan Chen, Myungjin Jung, Jung-Won An, Seung Yong Shin, Yunhwi Park, Sunrae Kim, Su Yong Nam, Woo-Jae Lee, Se-Hun Kwon
모한첸, 정명진, 안정원, 신승용, 박윤휘, 김선래, 남수용, 이우재, 권세훈
Korean J. Met. Mater. 2024;62(5):367-376.   Published online 2024 May 5
DOI: https://doi.org/10.3365/KJMM.2024.62.5.367

Abstract
AlN-MgO composites with different compositions were prepared by spark plasma sintering, and the effects of their composition on their microstructure, thermal properties, and mechanical properties were systemically investigated. MgO compositions in the AlN-MgO composites were controlled from 20 to 80 wt%. The results indicated that a phase transition did not..... More

                
Evaluation of Microstructure and Mechanical Properties of TiAl/HI-TEMP 820/ SCM440H Materials Manufactured through Vacuum Brazing according to Process Temperature
진공 브레이징을 통해 제조한 TiAl/HI-TEMP 820/SCM440H 재료의 공정 온도에 따른 미세조직 및 기계적 특성 평가
Sang-Kyu Yoo, Ji-Won Kim, Cho-Long Lee, Myung-Hoon Oh, In-Chul Choi
유상규, 김지원, 이초롱, 오명훈, 최인철
Korean J. Met. Mater. 2024;62(3):229-238.   Published online 2024 Feb 28
DOI: https://doi.org/10.3365/KJMM.2024.62.3.229

Abstract
The TiAl alloy is attracting attention as a lightweight and heat-resistant material, because of its high specific strength, excellent high-temperature formability, and fatigue strength. However, its applications are limited by its high unit price and low room temperature ductility. To overcome this issue, dissimilarly bonded materials have been extensively employed...... More

                
Effect of Solution Temperature and Quench Delay on the Microstructure and Mechanical Properties of an Extruded Al-Mg-Si-Cu-Mn alloy
Al-Mg-Si-Cu-Mn 합금 압출재의 미세조직 및 기계적 성질에 미치는 용체화 온도와 퀜칭 지연의 영향
Jisu Kim, Jeki Jung, Hyun-Seok Cheon, Byung-joo Kim, Cha-Yong Lim, Su-Hyeon Kim, Yoon Suk Choi
김지수, 정제기, 천현석, 김병주, 임차용, 김수현, 최윤석
Korean J. Met. Mater. 2024;62(2):132-141.   Published online 2024 Jan 30
DOI: https://doi.org/10.3365/KJMM.2024.62.2.132

Abstract
The effect of solution temperature and quench delay on the microstructure and mechanical properties of an extruded Al-Mg-Si-Cu-Mn alloy was investigated by employing differential scanning calorimetry, transmission electron microscopy, hardness test, and tensile test. The extruded specimens were held at 500 and 540 oC, respectively, for 80 min for solutionizing..... More

                
Effect of Molybdenum on the Mechanical and Corrosion Properties of Ti-xMo-2Fe Beta Alloys
Ti-xMo-2Fe 베타계 타이타늄 합금의 기계적 특성 및 부식 특성에 미치는 Mo의 영향 평가
Jeong-Yeon Park, Jae-Gwan Lee, Yong-Jae Lee, Dong-Geun Lee
박정연, 이재관, 이용재, 이동근
Korean J. Met. Mater. 2024;62(2):125-131.   Published online 2024 Jan 30
DOI: https://doi.org/10.3365/KJMM.2024.62.2.125

Abstract
Titanium alloys are currently used in offshore industries. The titanium alloys used in offshore plants need to have excellent corrosion resistance and mechanical properties because offshore plants are exposed to harsh corrosive environments. At this time, the Ti-6Al-4V ELI alloy is mainly used in offshore plants because it has excellent..... More

                
Changes in Microstructure, Mechanical and Electrical Properties with Progress of Cold Wire-Drawing for AA1070
Sang-Hyeon Jo, Seong-Hee Lee
Korean J. Met. Mater. 2023;61(11):867-873.   Published online 2023 Oct 29
DOI: https://doi.org/10.3365/KJMM.2023.61.11.867

Abstract
Commercial AA1070 alloy for electrical wire is severely deformed by the drawing process when a rod with a diameter of 2 mm is greatly reduced to 0.4 mm by multi-pass. Changes in the microstructure, mechanical properties, and electrical properties of the Al alloy during the wire-drawing process were investigated in..... More

                
Effect of Oxygen Content on Microstructure and Mechanical Properties of Additive Manufactured Ti-6Al-4V
산소함량에 따른 Ti-6Al-4V 적층제조 조형체의 미세조직 및 기계적 특성 변화
Tae Jin Kang, P. L Narayana, Seong Woo Choi, Jae Hyuk Kim, Jae-Keun Hong, Taekyung Lee
강태진, P.L. Narayana, 최성우, 김재혁, 홍재근, 이태경
Korean J. Met. Mater. 2023;61(9):714-720.   Published online 2023 Aug 30
DOI: https://doi.org/10.3365/KJMM.2023.61.9.714

Abstract
Titanium alloys are used in many fields including military, aerospace, and biomedical because of their excellent specific strength, corrosion resistance, and biocompatibility. Recently, much research has been focused on addressing the disadvantages of conventional manufacturing methods, including reducing material and energy waste when manufacturing titanium alloy parts by additive manufacturing..... More

                   Web of Science 3  Crossref 5
Effects of Stacking Number on Microstructure and Mechanical Properties for Cold Roll Bonding Process of Dissimilar Aluminum Alloy Sheets
Seong-Hee Lee
Korean J. Met. Mater. 2023;61(9):652-658.   Published online 2023 Aug 30
DOI: https://doi.org/10.3365/KJMM.2023.61.9.652

Abstract
A cold roll-bonding (CRB) process is applied to study the effects of stacking number on the microstructure and mechanical properties of roll-bonded and age-treated Al sheets. Commercial AA1050 and AA6061 sheets with a thickness of 2 mm were stacked alternately on each other to two and four layers, and roll-bonded..... More

                   Web of Science 4  Crossref 4
Tensile testing at the Extremely Low Temperature of 6K : Microstructure and Mechanical Properties of a Fe-Mn-Cr Steel
6K 초극저온 인장 시험 : Fe-Mn-Cr 강의 미세조직 및 기계적 물성
Young-Kyun Kim, Ka-Ram Lim, Young-Sang Na
김영균, 임가람, 나영상
Korean J. Met. Mater. 2023;61(6):389-396.   Published online 2023 May 18
DOI: https://doi.org/10.3365/KJMM.2023.61.6.389

Abstract
Materials with superior cryogenic strength and good ductility are increasingly in demand for resident friendly liquid-hydrogen (20K) storage tanks. Additionally, the space industry also requires materials that retain excellent mechanical properties at extremely low temperatures. However, mechanical testing at such low temperatures is highly limited due to the difficulties in..... More

                
Synthesis and Rapid Sintering of Ultra Fine TiB<sub>2</sub>-ZrO<sub>2</sub> Composite
초미립 TiB2-ZrO2 복합재료 합성 및 고속 소결
In-Jin Shon
손인진
Korean J. Met. Mater. 2023;61(5):324-329.   Published online 2023 Apr 20
DOI: https://doi.org/10.3365/KJMM.2023.61.5.324

Abstract
TiB2 is considered candidate materials for ultra-high temperature ceramics and cutting tools because of its a high thermal conductivity, a low coefficient of thermal expansion, a high hardness and high melting temperature. Despite these attractive properties, TiB2 applications are limited because it has a low fracture toughness below the brittle-ductile..... More

                
Thermal and Mechanical Properties of Cu-Graphite Composites with Spatial Anisotropy
Geon Hong Ryu, Changil Son, Jeffrey C. Suhling, Jiseok Lee, Sangha Park, Myunghwan Byun
Korean J. Met. Mater. 2023;61(2):120-125.   Published online 2023 Jan 27
DOI: https://doi.org/10.3365/KJMM.2023.61.2.120

Abstract
In the present study, we analyzed the thermal and mechanical properties of Cu-graphite composites (CGCs) with spatially anisotropic graphite layers. These composites were fabricated using a combination of electroless plating and spark plasma sintering (SPS) processes. Thermal conductivities and thermal expansion coefficients of the composites were measured using differential thermal..... More

                
Machine Learning Guided Prediction of Superhard Materials Based on Compositional Features
머신러닝을 이용한 화합물 조성기반 초경질 소재 특성 예측
Chunghee Nam
남충희
Korean J. Met. Mater. 2022;60(8):619-627.   Published online 2022 Jul 12
DOI: https://doi.org/10.3365/KJMM.2022.60.8.619

Abstract
In this study, the mechanical properties of materials were predicted using machine learning to search for superhard materials. Based on an AFOW database consisting of DFT quantum calculation values, the mechanical properties of materials were predicted using various machine learning models. For supervised learning, the entire data was divided into..... More

                   Web of Science 3  Crossref 2
Effect of Cu on the Microstructure of Al-8Zn-2.5Mg-xCu Alloys Fabricated by Twin roll casting
박판주조법으로 제조한 Al-8Zn-2.5Mg-xCu 합금 판재의 미세조직에 미치는 Cu의 영향
Dong-Guk Kim, Yong hee Jo, Yun-Soo Lee, Yong-You Kim, Hyoung-Wook Kim, Jung-Ki Kim
김동국, 조용희, 이윤수, 김용유, 김형욱, 김정기
Korean J. Met. Mater. 2022;60(4):329-339.   Published online 2022 Mar 28
DOI: https://doi.org/10.3365/KJMM.2022.60.4.329

Abstract
The effect of Cu content on the microstructure and mechanical properties of Al-8.0Zn-2.5Mg-xCu (x: 0, 1, 2, 3) aluminum alloys manufactured by the twin-roll casting process was investigated. The Al-8.0Zn-2.5Mg-xCu alloy showed an increase in surface defects with increasing Cu content. This is because the amount of residual liquid in..... More

                   Web of Science 1  Crossref 1
Effect of Dissolution of Precipitates on Mechanical Properties of A7075-T6 Alloy
A7075-T6 합금에서 η' 석출상의 재고용이 기계적 특성에 미치는 영향
Young-We Kim, Yong-Hee Jo, Yun-Soo Lee, Hyoung-Wook Kim, Je-In Lee
김영위, 조용희, 이윤수, 김형욱, 이제인
Korean J. Met. Mater. 2022;60(1):83-93.   Published online 2021 Dec 14
DOI: https://doi.org/10.3365/KJMM.2022.60.1.83

Abstract
The effects of dissolution of the η′ phase by solution treatment on the mechanical properties of A7075-T6 alloy were investigated. Immediately after solution treatment of the T6 sheet at 450 oC or higher, elongation significantly increased and dissolution of the η′ phase occurred. η′ is the main hardening phase. After..... More

                Supplementary       Web of Science 7  Crossref 9
Synthesis and Sintering of Nanostructured ZrB<sub>2</sub>-Al<sub>2</sub>O<sub>3</sub> Composite
나노구조의 ZrB2-Al2O3 복합재료 합성과 소결
In-Jin Shon
손인진
Korean J. Met. Mater. 2021;59(10):692-697.   Published online 2021 Sep 6
DOI: https://doi.org/10.3365/KJMM.2021.59.10.692

Abstract
ZrB2 is considered a candidate material for ultra-high temperature ceramics because of its high thermal conductivity, high melting point, and low coefficient of thermal expansion. Despite these attractive properties, ZrB2 applications are limited by its low fracture toughness below the brittle-ductile transition temperature. To improve its ductile properties, the approach..... More

                
Effect of Low Transformation Temperature Welding Consumable on Microstructure, Mechanical Properties and Residual Stress in Welded Joint of A516 Carbon Steel
Sungki Choi, Junsang Lee, Jae-Yik Lee, Seung-Kyun Kang, Young-Cheon Kim, Seung-Joon Lee, Dongil Kwon
Korean J. Met. Mater. 2021;59(8):524-532.   Published online 2021 Jul 5
DOI: https://doi.org/10.3365/KJMM.2021.59.8.524

Abstract
The microstructure, mechanical properties and residual stress of flux-cored arc welded ASTM A516-70N carbon steel using a Mn-based low-temperature transformation (LTT) welding consumable were investigated. Microstructural analysis with X-ray diffraction, an electron backscattered diffractometer and a field-emission scanning electron microscope showed that the LTT weld metal was made up of..... More

                   Web of Science 1  Crossref 1
Synthesis and Sintering of Nanostructured ZrB<sub>2</sub>-SiC Composite
나노구조의 ZrB2-SiC 복합재료 합성과 소결
In-Jin Shon
손인진
Korean J. Met. Mater. 2021;59(7):439-444.   Published online 2021 Jun 11
DOI: https://doi.org/10.3365/KJMM.2021.59.7.439

Abstract
ZrB2 is considered a candidate material for ultra-high temperature ceramics because of its high thermal conductivity, high melting point, and low coefficient of thermal expansion. Despite these attractive properties, applications of ZrB2 are limited by its low fracture toughness below the brittle-ductile transition temperature. To improve its ductile properties, the..... More

                   Web of Science 2  Crossref 3
Fabrication of WC-Graphene-Al Composites by Rapid Sintering and Their Mechanical Properties
급속소결에 의한 WC-Graphene-Al 복합재료 제조 및 기계적 성질
In-Jin Shon
손인진
Korean J. Met. Mater. 2021;59(6):384-391.   Published online 2021 May 26
DOI: https://doi.org/10.3365/KJMM.2021.59.6.384

Abstract
Tungsten carbides are very attractive because of their superior properties, e.g., high thermal and electrical conductivities, high melting point, high hardness, and relatively high chemical stability. Tungsten carbides with a binder metal, for example Ni or Co, are mainly used to fabricate nozzles, molds and cutting tools in the composite..... More

                   Web of Science 1  Crossref 1
Correlation between the Microstructure and Mechanical Properties of W-Bearing Ti-6Al-4V Alloys
Godwin Kwame Ahiale, In-Seok Kye, Young Sam Kwon, Yong-Jun Oh
Korean J. Met. Mater. 2021;59(6):357-364.   Published online 2021 May 26
DOI: https://doi.org/10.3365/KJMM.2021.59.6.357

Abstract
W-containing Ti-6Al-4V alloys (W=0, 1, and 5 wt%) were fabricated by the powder injection molding process, and the corresponding effects of tungsten content on the mechanical properties and microstructure of the alloys were investigated. The alloy powders were sintered at 1200 °C and then hot-isostatically-pressed at 900 °C. The fabricated..... More

                   Web of Science 3  Crossref 4
Initial Behavior of Additives and Mechanical Properties of Copper Foils on High Current Density
고전류밀도에서의 첨가제 초기 거동 및 동박의 기계적 특성
Tae-Gyu Woo, Jong-Jae Park, Il-Song Park
우태규, 박종재, 박일송
Korean J. Met. Mater. 2021;59(5):304-313.   Published online 2021 Apr 6
DOI: https://doi.org/10.3365/KJMM.2021.59.5.304

Abstract
In this study, we studied the surface and mechanical properties of multiple additives as well as the initial plating properties of individual additives. With the individual additive groups, copper crystals tended to converge at a stage above the critical amount of additive. When chloride ions were added, large crystals formed..... More

                   Web of Science 2  Crossref 2
Microstructure and Mechanical Properties of NiCrY<sub>2</sub>O<sub>3</sub> Alloy Sintered Powder Composed of Oxide-Embedded Metallic Particles
Changjae Kim, Jungho Gwak, Jaewon Lim, Minsuk Oh, Jeshin Park
Korean J. Met. Mater. 2020;58(12):843-851.   Published online 2020 Dec 4
DOI: https://doi.org/10.3365/KJMM.2020.58.12.843

Abstract
In this study, oxide (Y2O3)-embedded Ni particles were fabricated via a new process. The process involves the mechanical hydrogenation of Ni–Y alloy into Ni–YH2 and the selective oxidation of Ni–YH2 to Ni–Y2O3. The alloy powders were prepared for sintering by the mechanical alloying of a mixed powder. The powder was..... More

                   Web of Science 1  Crossref 2
Microstructures and mechanical properties of austenitic light-weight steels, and prediction of property distribution in large-scale slab
오스테나이트계 경량철강의 냉각 조건에 따른 미세조직, 기계적 특성 이해 및 대형 슬라브 내부 특성 분포 예측 연구
Tae-Ha Kim, Yoon Suk Choi, Kyeong-Won Kim, Seong-Jun Park, Jun Young Park, Kyeongjae Jeong, Heung Nam Han, Jong-Ho Shin
김태하, 최윤석, 김경원, 박성준, 박준영, 정경재, 한흥남, 신종호
Korean J. Met. Mater. 2020;58(12):830-842.   Published online 2020 Dec 4
DOI: https://doi.org/10.3365/KJMM.2020.58.12.830

Abstract
The effects of the cooling rate, after solution heat treatment, on the microstructures and mechanical properties of Fe-22Mn-8Al-0.8C-0.02Nb (low carbon) and Fe-20Mn-8Al-1.1C-0.1Nb (high carbon) light-weight steels were systematically investigated. The cooling process was controlled to achieve six different cooling rates, ranging from -0.016 to -465.1 oC/s. Under the slowest cooling..... More

                   Web of Science 3  Crossref 2
Rapid Sintering and Synthesis of Nanocrystalline Ta-ZrO<sub>2</sub> Composite
나노구조 Ta-ZrO2 복합재료 합성과 급속소결
Seong-Eun Kim, In-Jin Shon
김성은, 손인진
Korean J. Met. Mater. 2020;58(11):776-781.   Published online 2020 Oct 15
DOI: https://doi.org/10.3365/KJMM.2020.58.11.776

Abstract
ZrO2 is a promising candidate for knee and hip joint replacements due to its excellent combination of low density, corrosion resistance and biocompatibility. Nevertheless, a low fracture toughness of pure ZrO2 at room temperature limits its wider application in the industry. One of the most obvious ways to solve the..... More

                   Web of Science 4  Crossref 5
Effect of Inorganic Filler Addition on Non-Combustible and Mechanical Properties of Color Coated Steel Sheets
컬러강판 불연성 및 가공성에 미치는 무기충진제 첨가량의 영향
Moon-Hi Hong, In-kyu Kim, Hye-Jeong Yun
홍문희, 김인규, 윤혜정
Korean J. Met. Mater. 2020;58(11):768-775.   Published online 2020 Oct 15
DOI: https://doi.org/10.3365/KJMM.2020.58.11.768

Abstract
Recent large-scale fires in buildings and logistic warehouses have become a major social issue, involving both property loss and multiple casualties. To make color coated steel sheets non-combustible and/or have anti-fire properties, various ways of optimizing manufacturing parameters have been investigated for outer, inner, roof and ceiling panels. In the..... More

                
Property Evaluation of Tungsten-Carbide Hard Materials as a Function of Fe Contents
Fe 함량변화에 따른 텅스텐카바이드 초경소재의 특성평가
Ju-Hun Kim, Jeong-Han Lee, Junho Jang, Ik-Hyun Oh, Sung-Kil Hong, Hyun Kuk Park
김주훈, 이정한, 장준호, 오익현, 홍성길, 박현국
Korean J. Met. Mater. 2020;58(8):533-539.   Published online 2020 Jul 27
DOI: https://doi.org/10.3365/KJMM.2020.58.8.533

Abstract
In this study, consolidated WC-Fe compacts as a function of Fe contents were fabricated by a spark plasma sintering method, following the mixed by the ball-milled powder. Fe among the metallic binders was added to WC enhance not only the driving force of sintering process but also suppressing the grain..... More

                   Web of Science 7  Crossref 9
Mechanical Properties and Rapid Sintering of WC-BN-Al Composites
WC-BN-Al복합재료 급속소결 및 기계적 성질
Seong-Eun Kim, Su-Hwan Hong, In-Jin Shon
김성은, 홍수환, 손인진
Korean J. Met. Mater. 2020;58(7):453-458.   Published online 2020 Jul 5
DOI: https://doi.org/10.3365/KJMM.2020.58.7.453

Abstract
Tungsten carbides are quite attractive for their superior properties, e.g., high melting point, high hardness, high thermal and electrical conductivities, and relatively high chemical stability. Tungsten carbides with a binder metal, for example Co or Ni, are mainly used to produce cutting tools, nozzles and molds in the composite form...... More

                   Web of Science 6  Crossref 7
Effect of Heat Treatment on Mechanical Properties and Energy Absorption Capacity of 7003 Aluminum Alloy
7003 알루미늄 합금의 기계적 성질 및 에너지 흡수능에 미치는 열처리 조건의 영향
Hee-Ju Kim, Jeki Jung, Su-Hyeon Kim, Cha-Yong Lim, Yoon Suk Choi
김희주, 정제기, 김수현, 임차용, 최윤석
Korean J. Met. Mater. 2020;58(1):7-16.   Published online 2019 Dec 12
DOI: https://doi.org/10.3365/KJMM.2020.58.1.7

Abstract
The effects of heat treatment conditions on the mechanical properties and energy absorption capacity of 7003 (Al-6Zn-0.6Mg) aluminum alloy were studied. The extruded material was heat treated at various temperatures to prepare annealed or aged specimens. Tensile tests, hardness measurements, electron backscatter diffraction characterizations, and differential scanning calorimeter analyses were..... More

                   Web of Science 6  Crossref 6
Mechanical Properties and Fabrication of a Nanostructured Nb-Al<sub>2</sub>O<sub>3</sub> Composite by High Frequency Induction Heating
고주파 유도 가열에 의한 나노구조의 Nb-Al2O3 복합재료 제조와 기계적 성질
Seong-Eun Kim, Se-Hoon Oh, In-Jin Shon
김성은, 오세훈, 손인진
Korean J. Met. Mater. 2019;57(11):701-707.   Published online 2019 Nov 5
DOI: https://doi.org/10.3365/KJMM.2019.57.11.701

Abstract
Al2O3 has a high Young’s modulus (380 GPa), a low density (3.98 g· cm-3), good high-temperature mechanical properties, biocompatibility and excellent oxidation resistance. Al2O3 has been used for automotive, aerospace, bio-materials and various industrial applications. Despite its various merits, the low fracture toughness of the material below the brittle-ductile transition..... More

                   Web of Science 2  Crossref 1
Effect of Pre-Aging Treatment on Bake-Hardenability of Al-8.0Zn-2.5Mg-2.0Cu Alloy Sheet Fabricated by Twin-Roll Casting Process
박판주조공정으로 제조한 Al-8.0Zn-2.5Mg-2.0Cu 합금 판재의 소부경화특성에 미치는 예비시효의 영향
Ji-Goo Heo, Yun-Soo Lee, Min-Seok Kim, Hyoung-Wook Kim, Yang-Do Kim
허지구, 이윤수, 김민석, 김형욱, 김양도
Korean J. Met. Mater. 2019;57(6):396-404.   Published online 2019 May 16
DOI: https://doi.org/10.3365/KJMM.2019.57.6.396

Abstract
The effects of natural and pre-aging on the microstructure and mechanical properties of Al-8.0Zn-2.5Mg-2.0Cu aluminum alloy sheet fabricated by twin roll casting were investigated. Immediately after solution treatment, the Al-8.0Zn-2.5Mg-2.0Cu alloy sheet had a yield strength of 173 MPa and elongation of 19.5%. The hardness of the Al-8.0Zn-2.5Mg-2.0Cu alloy sheet..... More

                   Web of Science 8  Crossref 9
Effect of BN Addition on the Mechanical Properties of AlN
AlN 기계적 성질에 미치는 BN 첨가 영향
Woo-Jin Cho, Se-Hoon Oh, In-Jin Shon
조우진, 오세훈, 손인진
Korean J. Met. Mater. 2019;57(5):310-315.   Published online 2019 Apr 10
DOI: https://doi.org/10.3365/KJMM.2019.57.5.310

Abstract
Aluminum nitride (AlN) has several attractive properties including high thermal conductivity, excellent electrical insulation, a thermal expansion coefficient close to that of Si and low density. Accordingly, it is considered a promising packing material and substrate for high power integrated circuits. However, its low fracture toughness at room temperature limits..... More

                   Web of Science 9  Crossref 9
Investigation of the Mechanical/Thermal Properties of Nano-Scale Silicon Nitride Membranes
나노스케일 질화규소 멤브레인의 기계적, 열적 특성 분석
Yong Ju Jang, Hyeon-Jin Shin, Seong Ju Wi, Ha Neul Kim, Gi Sung Lee, Jinho Ahn
장용주, 신현진, 위성주, 김하늘, 이기성, 안진호
Korean J. Met. Mater. 2019;57(2):124-129.   Published online 2019 Jan 9
DOI: https://doi.org/10.3365/KJMM.2019.57.2.124

Abstract
In micro/nano electro-mechanical system, silicon nitride (SiNx) membrane has been widely used in sensors, energy harvesting and optical filters because of its mechanical/chemical stability. However, it is necessary to verify mechanical and thermal properties of nanoscale SiNx membranes to ensure the desirable reliability and durability of a device because the..... More

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